Home > Library VÚGTK > Patents > Sposob izmerenija linejnogo razmera elementov topologičeskogo risunka mikroschem
 
Sposob izmerenija linejnogo razmera elementov topologičeskogo risunka mikroschem
Jegorova, G. A. ; Lonskij, E. S. ; Potapov, Je. V. ; Rakov, A. V.

Signature: SSSRPAT1146549
Published: [S.l.]: [s.n.], 1985


Extent: 4 s., 2 obr.
Keywords: patenty
Publication type: patenty
Notes: 1 sv., G 01 B 11/02., 8.4.1983, 23.3.1985

The record appears in these collections:
Library VÚGTK > Patents
Monographic Publications

 Record created 2014-01-11, last modified 2018-11-27
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